PublisherEscola Tècnica Superior d'Enginyers de Telecomunicació de Barcelona
Rights accessOpen Access
The remarkable progress ofMEMS (Micro
Electro Mechanical Systems) research has
reached the stage where practical applications
are intensely pursued. Based on highperformance
systems cornmercial products have
made remarkable progress in many fields. This
paper discusses the underlying principIes for
MEMS, going over the materials and processes
used for their fabrication. It also presents two
state of the art examples, under development in
the industry. A brief discussion of terminology
is also included.
CitationSáenz, Juan Pablo. An Introduction to micro electro mechanical systems (MEMS). "Buran", 2005, núm. 22, p. 13-18.
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