Characterisation modelling and calibration of an electrothermal micromirror with 3DOF

Abstract

The work presented as follows is the final project of my five years Industrial Engineering degree. It tries to make good use of the skills acquired along the degree as well as to learn new ones. The project is focused in the characterisation, modelling and calibration of an electrothermal MEMS mirror with 3 degrees of freedom. This mirrors are used in applications based on optical microsystems such as confocal microscopes for sample analysis, microspectrometers, optical coherence tomographies for in-vivo cancer detection and laser microsurgery among others. All this applications make the study of MEMS mirrors a great and interesting opportunity. Hence, to achieve a complete characterisation and developing a good model are basic to succeed in the control of the device in a near future. The work is divided in 4 main chapters, the first one where an introduction of the topic is done, the second one presents the device used as well as introduces to the reader to electrothermal actuation. The third chapter demonstrates an electrothermal model which is validated later in chapter 4 where all the experimentation is presented. Finally some conclusions about the work and the training period are done.