Characterization of stratified media using high-resolution thin film measurement techniques

dc.contributor	Laguarta Bertran, Ferran
dc.contributor.author	Aguerri Cavero, Alberto
dc.date.accessioned	2010-12-03T08:52:44Z
dc.date.available	2010-12-03T08:52:44Z
dc.date.issued	2010
dc.identifier.uri	http://hdl.handle.net/2099.1/10416
dc.description	Tesina feta en col.laboració amb Sensofar-Tech, S.L.
dc.description.abstract	The characterization of stratified media has become essential in the development of industrial applications such as LEDs, solar cells, medical devices, MEMs, MOEMS, etc. This characterization involves measuring the thickness and optical constants of thin layers with high lateral and vertical resolutions. For this purpose, we integrated a spectroscopic reflectometer into an existing 3D optical profiler. We also analyzed how the numerical aperture affects the thickness measurements.
dc.language.iso	eng
dc.publisher	Universitat Politècnica de Catalunya
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 Spain
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.subject	Àrees temàtiques de la UPC::Enginyeria dels materials
dc.subject.other	3D optical profiler
dc.subject.other	Numerical aperture
dc.subject.other	Thin film
dc.subject.other	Stratified media
dc.title	Characterization of stratified media using high-resolution thin film measurement techniques
dc.type	Master thesis
dc.subject.lemac	Semiconductors de pel·lícula fina
dc.rights.access	Open Access
dc.audience.educationlevel	Màster
dc.audience.mediator	Escola Tècnica Superior d'Enginyeria Industrial de Barcelona

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