Characterization of stratified media using high-resolution thin film measurement techniques
Tutor / director / evaluatorLaguarta Bertran, Ferran
Document typeMaster thesis
Rights accessOpen Access
The characterization of stratified media has become essential in the development of industrial applications such as LEDs, solar cells, medical devices, MEMs, MOEMS, etc. This characterization involves measuring the thickness and optical constants of thin layers with high lateral and vertical resolutions. For this purpose, we integrated a spectroscopic reflectometer into an existing 3D optical profiler. We also analyzed how the numerical aperture affects the thickness measurements.
Tesina feta en col.laboració amb Sensofar-Tech, S.L.