Impact of metallization techniques of surface passivation of high efficiency crystalline silicon solar cells
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10.4229/28thEUPVSEC2013-2BV.2.1
Inclou dades d'ús des de 2022
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hdl:2117/21793
Tipus de documentText en actes de congrés
Data publicació2013
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Abstract
Most of the high-efficiency c-Si solar cells are based on dielectric films that electrically passivate c-Si
surface and must keep their passivation properties after metal deposition on top of them. This work studies the impact
of three different aluminum Physical Vapor Deposition (PVD) methods (thermal, e-beam, sputtering) on the c-Si
surface passivation provided by SiO2 and Al2O3 films. Effective surface recombination velocity is measured before
and after metal deposition. Results show that e-beam and sputtering techniques degrade surface passivation while
thermal evaporation has no impact. Surface passivation can be recovered and even improved by means of an
annealing with the aluminum film on top of the dielectric leading to the so-called alnealing. Additionally, after this
alnealing Capacitance-Voltage measurements and lifetime spectroscopy analysis suggest a strong dependence of
fixed charge density for SiO2 films on the metal deposition technique that helps in c-Si surface passivation.
CitacióColl, A. [et al.]. Impact of metallization techniques of surface passivation of high efficiency crystalline silicon solar cells. A: European Photovoltaic Solar Energy Conference and Exhibition. "Proceedings EU PSVSEC 2013, 28th European Photovoltaic Solar Energy Conference and Exhibition, Parc des Expositions Paris Nord Villepinte, Paris, France, Conference 30 Sep - 04 Oct 2013, Exhibition 01 Oct - 03 Oct 2013". Paris Nord Villepinte: 2013, p. 1213-1216.
ISBN3-936338-33-7
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EU PVSEC 2013 2BV.2.1_paper.pdf | text complet | 431,1Kb | Accés restringit |