Nanostep height measurement via spatial mode projection
Cita com:
hdl:2117/21706
Tipus de documentArticle
Data publicació2014-01-15
Condicions d'accésAccés obert
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Abstract
We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam
’
s spa-
tial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly tailored
spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one-
eightieth (
1
∕
80
) of the wavelength with a standard error in the picometer scale. Since our scheme enhances the
signal-to-noise ratio, which effectively increases the sensitivity of detection, the extension of this technique to
the detection of subnanometric layer thicknesses is feasible
CitacióHermosa, N. [et al.]. Nanostep height measurement via spatial mode projection. "Optics letters", 15 Gener 2014, vol. 39, núm. 2, p. 299-302.
ISSN0146-9592
Versió de l'editorhttp://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-2-299
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Nanostep height ... patial mode projection.pdf | Nanostep height measurement via spatial mode projection.pdf | 512,5Kb | Visualitza/Obre |