http://hdl.handle.net/2117/13350 2013-05-26T09:07:48Z http://hdl.handle.net/2117/13221 Title: Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material Authors: Sousa, P.M.; Gutierrez, M.; Mendoza Gómez, Ernesto; Llobera, A.; Chu, V.; Conde, J.P. Abstract: Carboxylated multi-wall carbon-nanotubes (CNTs) monolayers are integrated on microfabricated all-polymer micro-electromechanical systems (pMEMS) resonator bridges on glass substrates. The structural layer of the MEMS bridges is a multilayer blended conductive polymer based on poly(3,4-ethylenedioxythiophene):poly (styrenesulfonate) (PEDOT:PSS) to which functionalized CNT monolayers are electrostatically attached. The resonance frequency (fres) of electrostatically actuated pMEMS bridges was measured as a function of their length (32–67 lm) for different multilayer compositions. A significant increase in fres and quality factor (Q) with the addition of CNT monolayers to the PEDOT:PSS structural material is observed, demonstrating that CNT monolayers can be used to modulate pMEMS resonator properties. 2011-09-16T13:48:33Z