• Dielectric charge measurements in capacitive microelectromechanical switches 

      Molinero Giles, David; Comulada Simpson, Ricard; Castañer Muñoz, Luis María (American Institute of Physics, 2006-09-06)
      Article
      Accés restringit per política de l'editorial
      Measurements of transient currents from the discharge of microelectromechanical capacitive switches after charging the dielectric with an ion gun are reported. It is shown that both the charge sign and the charge amount ...