• Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate 

      Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antoni; Nebot Serra, Àlvar (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2007-10-31)
      Article
      Accés obert
      This paper presents an electrothermally actuated lateral resistive-contact switch for application to low-gigahertz-band communication systems. It was manufactured on a standard low-resistivity substrate, and its RF performance ...