• Nondestructive diagnosis of mechanical misalignments in dual axis accelerometers 

      Gómez Pau, Álvaro; Balado Suárez, Luz María; Figueras Pàmies, Joan (2013)
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      Microelectromechanical systems production is still an immature technology compared to the classical semiconductor industry. MEMS fabrication and packaging processes may present misalignments which result in an improper ...