• Study of intermodulation in RF MEMS variable capacitors 

      Girbau Sala, David; Otegi Urdanpilleta, Nerea; Pradell i Cara, Lluís; Lázaro Guillén, Antoni (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2006-03-31)
      Article
      Accés obert
      This paper provides a rigorous study of the causes and physical origins of intermodulation distortion (IMD) in RF microelectromechanical systems (MEMS) capacitors, its analytical dependence on the MEMS device design ...