Exploració per tema "MEMS reliability"
Ara es mostren els items 1-6 de 6
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A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS
(2015-04-01)
Article
Accés obertThis letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, ... -
Characterization method of the dynamics of the trapped charge in contactless capacitive MEMS
(Institute of Electrical and Electronics Engineers (IEEE), 2015)
Text en actes de congrés
Accés restringit per política de l'editorialDielectric charging of insulating films in microelectromechanical systems (MEMS) has a crucial effect on the operation of those devices. A new method is presented in order to characterize the dynamics of the charge trapped ... -
Closed-loop compensation of dielectric charge induced by ionizing radiation
(2015-06-01)
Article
Accés obertThis letter investigates the capability of dielectric charge control loops to cope with charge induced by ionizing radiation. To this effect, an microelectromechanical systems (MEMS) variable capacitor has been irradiated ... -
Delta-sigma control of dielectric charge for contactless capacitive MEMS
(2014-08-01)
Article
Accés restringit per política de l'editorialIn this paper, we present a new closed-loop control method of dielectric charge for contactless capacitive microelectromechanical systems. The method uses a feedback loop to maintain the net charge in the dielectric layer ... -
Modelling of a charge control method for capacitive MEMS
(Institute of Electrical and Electronics Engineers (IEEE), 2013)
Text en actes de congrés
Accés restringit per política de l'editorialCharging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as ... -
Real-time characterization of dielectric charging in contactless capacitive MEMS
(2015-03-01)
Article
Accés obertThis paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net ...