Exploració per tema "MEMS reliability"

Ara es mostren els items 1-6 de 6

    • A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS 

      Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Domínguez Pumar, Manuel (2015-04-01)
      Article
      Accés obert
      This letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, ...

    • Characterization method of the dynamics of the trapped charge in contactless capacitive MEMS 

      Gorreta Mariné, Sergio; Pons Nin, Joan; Domínguez Pumar, Manuel; Blokhina, Elena; Feely, Orla (Institute of Electrical and Electronics Engineers (IEEE), 2015)
      Text en actes de congrés
      Accés restringit per política de l'editorial
      Dielectric charging of insulating films in microelectromechanical systems (MEMS) has a crucial effect on the operation of those devices. A new method is presented in order to characterize the dynamics of the charge trapped ...

    • Closed-loop compensation of dielectric charge induced by ionizing radiation 

      Domínguez Pumar, Manuel; Gorreta Mariné, Sergio; Pons Nin, Joan; Gomez Rodriguez, Faustino; Gonzalez Castaño, Diego; Muschitiello, Michele (2015-06-01)
      Article
      Accés obert
      This letter investigates the capability of dielectric charge control loops to cope with charge induced by ionizing radiation. To this effect, an microelectromechanical systems (MEMS) variable capacitor has been irradiated ...

    • Delta-sigma control of dielectric charge for contactless capacitive MEMS 

      Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Feely, Orla; Domínguez Pumar, Manuel (2014-08-01)
      Article
      Accés restringit per política de l'editorial
      In this paper, we present a new closed-loop control method of dielectric charge for contactless capacitive microelectromechanical systems. The method uses a feedback loop to maintain the net charge in the dielectric layer ...

    • Modelling of a charge control method for capacitive MEMS 

      Giounanlis, Panonios; Blokhina, Elena; Feely, Orla; Domínguez Pumar, Manuel; Pons Nin, Joan; Gorreta Mariné, Sergio (Institute of Electrical and Electronics Engineers (IEEE), 2013)
      Text en actes de congrés
      Accés restringit per política de l'editorial
      Charging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as ...

    • Real-time characterization of dielectric charging in contactless capacitive MEMS 

      Domínguez Pumar, Manuel; Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Giounanlis, Panonios; Feely, Orla (2015-03-01)
      Article
      Accés obert
      This paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net ...