• High-density capacitor devices based on macroporous silicon and metal electroplating 

      Vega, Didac; Reina Marsinyach, Jordi; Pavón Urbano, Ramón; Rodríguez Martínez, Ángel (2014-01)
      Article
      Accés restringit per política de l'editorial
      This paper presents a novel technique for the fabrication of ultrahigh capacitance structures based on macroporous silicon. Electrochemical etching is used to create a 3-D template in silicon. These structures reach high ...