Exploració per tema "High density capacitors"
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High-density capacitor devices based on macroporous silicon and metal electroplating
(2014-01)
Article
Accés restringit per política de l'editorialThis paper presents a novel technique for the fabrication of ultrahigh capacitance structures based on macroporous silicon. Electrochemical etching is used to create a 3-D template in silicon. These structures reach high ...