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Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches.
(JOHN WILEY & SONS INC, 2007-06-01)
Article
Accés obertIn this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation cannot be applied. The model ...