Exploració per tema "Dielectric thin films"
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Comparison of air gap breakdown and substrate injection as mechanisms to induce dielectric charching in microelectromechanical switches
(American Institute of Physics, 2008-01-29)
Article
Accés restringit per política de l'editorialExperiments show that air breakdown and substrate carrier conduction can be responsible of the dielectric charging of microelectromechanical devices after electrical stress. Test conducted under vacuum allows us to isolate ...