• Dielectric charge control in electrostatic MEMS positioners/varactors 

      Blokhina, Elena; Gorreta Mariné, Sergio; Lopez, David; Molinero Giles, David; Feely, Orla; Pons Nin, Joan; Domínguez Pumar, Manuel (2012-06)
      Article
      Accés restringit per política de l'editorial
      A new dynamical closed-loop method is proposed to control dielectric charging in capacitive microelectromechanical systems (MEMS) positioners/varactors for enhanced reliability and robustness. Instead of adjusting the ...