• A highly-repeatable, broadband 180º phase switch for integrated MEMS processes 

      Llamas Morote, Marco Antonio; Girbau Sala, David; Ribó, M.; Pradell i Cara, Lluís; Giacomozzi, Flavio; Colpo, S.; Coccetti, Favio; Aouba, Stephane (2011)
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      A broadband 0º/180º phase switch based on a slotline-coplanar-waveguide cross loaded with two MEMS switches in opposed (ON/OFF or OFF/ON) states, is reported. The fabrication was made on high-resistivity silicon substrates ...