• Silicon micro-lens antennas for THz integrated arrays 

      Alonso del Pino, María; Llombart, Nuria; Lee, Clement; Jung, C.; Chattopadhyay, G.; Jofre Roca, Lluís; Mehdi, Imran (IEEE, 2011)
      Article
      Accés restringit per política de l'editorial
      In this paper, we describe the characterization of silicon micro-lenses fabricated by two different techniques, one using laser micromachining and the other developed using photolithographical techniques. The micro-lens ...