Exploració per autor "Gómez Fernández, Sergio"
Ara es mostren els items 12-13 de 13
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Regular cell design approach considering lithography-induced process variations
Gómez Fernández, Sergio (Universitat Politècnica de Catalunya, 2014-10-17)
Tesi
Accés obertThe deployment delays for EUVL, forces IC design to continue using 193nm wavelength lithography with innovative and costly techniques in order to faithfully print sub-wavelength features and combat lithography induced ... -
Yield estimation model for lithography hotspot distortions
Gómez Fernández, Sergio; Moll Echeto, Francisco de Borja (Institution of Electrical Engineers, 2013-08-15)
Article
Accés restringit per política de l'editorialA yield formulation model to estimate the amount of lithography distortion expected in a printed layout is proposed. The yield formulation relates the probability of non-failure of a lithography hotspot with the yield ...