Dielectric charging of insulating films in microelectromechanical systems (MEMS) has a crucial effect on the operation of those devices. A new method is presented in order to characterize the dynamics of the charge trapped ...

The purpose of this paper is to show that the charge induced by radiation in a dielectric on which a sigma–delta control of dielectric charge is implemented, can be seen as a disturbance in a sliding mode controller. ...

Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence ...

This letter investigates the capability of dielectric charge control loops to cope with charge induced by ionizing radiation. To this effect, an microelectromechanical systems (MEMS) variable capacitor has been irradiated ...

This paper extends our previous work on the selective excitation of mechanical vibration modes in MEMS devices using pulsed digital oscillators (PDOs). It begins by presenting extensive simulation results using the set ...

In this paper, we present a new closed-loop control method of dielectric charge for contactless capacitive microelectromechanical systems. The method uses a feedback loop to maintain the net charge in the dielectric layer ...

This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both ...

The objective of this paper is to introduce a modeling strategy to characterize the dynamics of the charge trapped in the dielectric of MOS capacitors, using Diffusive Representation. Experimental corroboration is presented ...

In this work the effect of the dielectrophoretic force (DEP) in the self-assembly process of nanoparticles electrosprayed onto a substrate, is examined. DEP force is originated by the electric field created by the electrospray ...