Exploració per tema "CMOS-MEMS"

Ara es mostren els items 1-9 de 9

    • A comprehensive high-level model for CMOS-MEMS resonators 

      Banerji, Saoni; Fernández, Daniel; Madrenas Boadas, Jordi (2018-01-24)
      Article
      Accés obert
      This paper presents a behavioral modeling technique for CMOS microelectromechanical systems (MEMS) microresonators that enables simulation of an MEMS resonator model in Analog Hardware Description Language format within a ...

    • Arquitecturas y circuitos CMOS para el control, generación y procesado de señal de MEMS 

      Fernández Martínez, Daniel (Universitat Politècnica de Catalunya, 2008-11-01)
      Tesi
      Accés obert
      En esta tesis se muestran arquitecturas y circuitos CMOS para el control de actuadores electroestáticos MEMS y para la generación y procesado de las señales proveniente de microsistemas. <br/>En el primer capítulo se ...

    • CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis 

      Banerji, Saoni; Michalik, Piotr Jozef; Méndez Fernández, Daniel; Madrenas Boadas, Jordi; Mola, Albert; Montanyà, Josep (2017-09-01)
      Article
      Accés obert
      An optimized CMOS-MEMS resonant pressure sensor with enhanced sensitivity at atmospheric pressure has been reported in this paper. The presented work reports modeling and characterization of a resonant pressure sensor, ...

    • Design of a conditioning circuit for magnetic CMOS-MEMS sensors 

      Bauzà Alcover, Claus (Universitat Politècnica de Catalunya, 2017-10)
      Projecte Final de Màster Oficial
      Accés obert

    • Design optimization of a CMOS-MEMS resonator for molecular adherence applications 

      Perelló Roig, Rafel (Universitat Politècnica de Catalunya, 2016-06)
      Projecte Final de Màster Oficial
      Accés restringit per decisió de l'autor
      Realitzat a/amb:   Universitat de les Illes Balears
      Intensive research within the biomedical domain during the last decade has raised an increasing interest on the capabilities of disease diagnosis based on exhaled breath analysis. While human exhaled breath has been shown ...

    • Experiments on MEMS Integration in 0.25 turn CMOS Process 

      Michalik, Piotr Jozef; Fernández, Daniel; Wietstruck, Mehmet; Kaynak, Mehmet; Madrenas Boadas, Jordi (Multidisciplinary Digital Publishing Institute (MDPI), 2018-07-01)
      Article
      Accés obert
      In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental ...

    • Manufacturing Issues of BEOL CMOS-MEMS Devices 

      Valle Fraga, Juan José; Fernández Martínez, Daniel; Gibrat, Olivier; Madrenas Boadas, Jordi (Institute of Electrical and Electronics Engineers (IEEE), 2021-06-07)
      Article
      Accés obert
      In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- HF ) oxide etching. During the study we have ...

    • Measurement device for cmos-mems accelerometer 

      Somasundaram, Namitha (Universitat Politècnica de Catalunya, 2014-06-06)
      Projecte/Treball Final de Carrera
      Accés obert
      [ANGLÈS] This project reports the process of development of the Printed Circuit Board (PCB) - Zephyr for the experimental CMOS MEMS accelerometer testchip, Bailed II. The problem of capacitance mismatch at the input bridge ...

    • Under pressure? Don’t lose direction! Smart sensors: Development of CMOS and MEMS on the same platform 

      Sánchez Chiva, José María; Banerji, Saoni (2016)
      Comunicació de congrés
      Accés obert
      Micro Electro Mechanical Systems (MEMS) are movable structures fabricated on the surface of silicon chips by selectively depositing and etching away materials and silicon. Such movement allows the measurement of a wide ...