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  • Dielectric charge measurements in capacitive microelectromechanical switches 

    Molinero Giles, David; Comulada Simpson, Ricard; Castañer Muñoz, Luis María (American Institute of Physics, 2006-09-06)
    Article
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    Measurements of transient currents from the discharge of microelectromechanical capacitive switches after charging the dielectric with an ion gun are reported. It is shown that both the charge sign and the charge amount ...