Now showing items 1-2 of 2

  • Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate 

    Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antoni; Nebot Serra, Àlvar (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2007-10-31)
    Article
    Open Access
    This paper presents an electrothermally actuated lateral resistive-contact switch for application to low-gigahertz-band communication systems. It was manufactured on a standard low-resistivity substrate, and its RF performance ...
  • Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches. 

    Lázaro Guillén, Antoni; Girbau Sala, David; Pradell i Cara, Lluís; Nebot Serra, Àlvar (JOHN WILEY & SONS INC, 2007-06-01)
    Article
    Open Access
    In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation cannot be applied. The model ...