Now showing items 1-3 of 3

  • Comparison of air gap breakdown and substrate injection as mechanisms to induce dielectric charching in microelectromechanical switches 

    Molinero Giles, David; Castañer Muñoz, Luis María (American Institute of Physics, 2008-01-29)
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    Experiments show that air breakdown and substrate carrier conduction can be responsible of the dielectric charging of microelectromechanical devices after electrical stress. Test conducted under vacuum allows us to isolate ...
  • Dielectric charge control in electrostatic MEMS positioners/varactors 

    Blokhina, Elena; Gorreta, Sergi; Lopez, David; Molinero Giles, David; Feely, Orla; Pons Nin, Joan; Domínguez Pumar, Manuel (2012-06)
    Article
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    A new dynamical closed-loop method is proposed to control dielectric charging in capacitive microelectromechanical systems (MEMS) positioners/varactors for enhanced reliability and robustness. Instead of adjusting the ...
  • Dielectric charge measurements in capacitive microelectromechanical switches 

    Molinero Giles, David; Comulada Simpson, Ricard; Castañer Muñoz, Luis María (American Institute of Physics, 2006-09-06)
    Article
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    Measurements of transient currents from the discharge of microelectromechanical capacitive switches after charging the dielectric with an ion gun are reported. It is shown that both the charge sign and the charge amount ...