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  • Silicon micro-lens antennas for THz integrated arrays 

    Alonso, M.; Llombart, Nuria; Lee, Clement; Jung, C.; Chattopadhyay, G.; Jofre Roca, Lluís; Mehdi, Imran (IEEE, 2011)
    Article
    Restricted access - publisher's policy
    In this paper, we describe the characterization of silicon micro-lenses fabricated by two different techniques, one using laser micromachining and the other developed using photolithographical techniques. The micro-lens ...