Exploració per autor "Michalik, Piotr Jozef"
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CMOS BEOL-embedded z-axis accelerometer
Michalik, Piotr Jozef; Sánchez Chiva, José María; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (Institution of Electrical Engineers, 2015-05-28)
Article
Accés obertA first reported complementary metal-oxide semiconductor (CMOS)-integrated acceleration sensor obtained through isotropic inter-metal dielectric (IMD) etching of a back-end-of-line (BEOL) integrated circuit interconnection ... -
CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis
Banerji, Saoni; Michalik, Piotr Jozef; Méndez Fernández, Daniel; Madrenas Boadas, Jordi; Mola, Albert; Montanyà, Josep (2017-09-01)
Article
Accés obertAn optimized CMOS-MEMS resonant pressure sensor with enhanced sensitivity at atmospheric pressure has been reported in this paper. The presented work reports modeling and characterization of a resonant pressure sensor, ... -
Experiments on MEMS Integration in 0.25 turn CMOS Process
Michalik, Piotr Jozef; Fernández, Daniel; Wietstruck, Mehmet; Kaynak, Mehmet; Madrenas Boadas, Jordi (Multidisciplinary Digital Publishing Institute (MDPI), 2018-07-01)
Article
Accés obertIn this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental ... -
Result-consistent counter sampling scheme for coarse-fine TDCs
Michalik, Piotr Jozef; Fernandez, D.; Madrenas Boadas, Jordi (Institution of Electrical Engineers, 2012-09-13)
Article
Accés restringit per política de l'editorial -
Sense/Drive Architecture for CMOS-MEMS Accelerometers with Relaxation Oscillator and TDC
Michalik, Piotr Jozef; Madrenas Boadas, Jordi; Fernández Martínez, Daniel (IEEE Computational Intelligence Society, 2012)
Text en actes de congrés
Accés obert